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翁占坤

   

翁占坤

   

从事专业

纳米操纵与制造

出生年月

1974.10

研究方向

微纳电子技术

学历/学位

研究生/博士

   

教授

电子邮箱

Wengzk@cust.edu.cn

联系电话

0431-85582930

个人科研简介

19987月获长春光学精密机械学院(现长春理工大学)学士学位,2008年获大连理工大学博士学位。20119-20129月,美国密歇根州立大学访问学者,2014.11-2014.12 芬兰坦佩雷理工大学 短期访问。主持国家自然基金项目面上项目、科技部重点研发计划政府间科技创新合作重点专项、吉林省科技厅和教育厅项目各1项,参与973计划、欧盟框架协议项目、科技部国际合作专项、国家自然基金和省部级项目20余项,发表论文40余篇,授权国家专利12余项。主要研究领域为纳米阵列结构制备及物性研究和纳米操纵技术等。主要学术兼职:Int. J. nanomanufacturingElectrochemica Acta,《光子学报》等国际刊物审稿人;3M-NANO国际会议程序委员会成员(2011年至今)/出版负责人(2011年、2015-至今)

硕士招生:

理学院—学科:电子科学与技术(代码077400方向(03:纳米操纵与制造技术。

电信学院—学科:电子与通信工程(代码085208方向(03:微纳电子技术。

已毕业硕士研究生7名;目前在读硕士生10名(含联合培养)。

科研奖励、科研项目

19、润湿、粘附、反射可控功能表面设计与制造,国家重点研发计划政府间科技合作重点专项2016.12-2019.11(在研)(研究任务负责人);

18、电化学振荡研究及其在InP三维材料制备中的应用,吉林省自然基金2016.1-2018.12(在研)(负责人);

17、激光干涉光刻辅助梯度渐变多孔结构材料制备,吉林省教育厅2015-2017(结题)(负责人);

16、激光干涉诱导电化学制造半导体纳米阵列结构研究,国家自然基金面上项目2012.1 — 2015.12, (结题)(负责人);

15BioRAFP7(欧盟第七框架协议项目)2014.1-2017.12(结题)(参与);

14ECNANOMANFP7(欧盟第七框架协议项目)2011.1-2014.12(结题)(参与);

13、机器人纳米操纵技术及在生物医学中的应用,国家国际科技合作(重点)专项2012.1-2014.12(结题)(参与);

12、基于激光干涉的纳米尺度直接光刻技术研究,吉林省自然科学基金2011.1-2013.12(结题)(参与);

11、激光干涉诱导湿法制备化合物半导体有序纳米结构研究,吉林省国际合作项目2011.1-2013.12(结题)(参与);

10LaserNamiFP7(欧盟第七框架协议项目)2010.1-2013.12(结题)(参与);

9、宽光谱高效硅太阳能电池关键技术研究,广东开发区发展引导专项2011.1-2013.12(结题)(参与);

8InP有序纳米孔阵列形成机理及可控制备,长春理工大学科技基金2011.1-2012.12,(结题)(主持人);

7、机器人微纳混合装配技术及在肿瘤细胞诊断与治疗中的应用,吉林省国际科技合作2011.1-2012.12(结题)(参与);

6、机器人微纳操纵/操作技术及其在治疗急性肺损伤和结肠癌中的应用,吉林省教育厅2011.1-2012.12(结题);

5、微纳操纵/操作技术及其在富勒烯衍生物抗细胞凋亡研究中的应用,长春市科技局国际合作2011-2012(结题)(参与);

4、直接激光干涉纳米光刻技术研究,国家自然(主任)基金2010.01-2010.12(结题)(参与);

3、直接激光干涉纳米光刻技术及应用研究,长春市国际科技合作2010.1-2012.12(结题)(参与);

2、纳米结构高效太阳能电池制造的关键技术研究,广东省中科院战略合作项目2010.1-2011.12(结题)(参与);

1、纳米结构新型太阳能电池的开发与研制,吉林省科技厅2009.1-2011.12(结题)(参与);

0InP规则纳米阵列的制备及相关性质研究,国家自然科学基金面上项目2004.1-2006.12(结题)(参与)。

发表论文、

授权专利

发表学术论文60余篇,包括ACS Appl.Mater.&Inter.J.Electrochem.Soc.,APLJAP等杂志。

杂志论文

25.Zhan Zhaoyao Xu LipingAn J., Du H., Weng Zhankun, Lu Wenqiang, Direct Catalyst-Free Chemical Vapor Deposition of ZnO Nanowire array UV Photodetectors with Enhanced Photoresponse Speed, Advanced Engineering Materials, 2017, DOI: 10.1002/adem.201700101.

24.Weng Zhankun#*, Chai Xiangyu, Liu Lanjiao, Li Li, Xu Hongmei, Song Zhengxun, Wang Zuobin, Wu Cuiting, Mi Weixun, Liang Kaihua, Effects of Temperature and Current Density on the Porous Structure of InP, J. Solid. State Electrochem., 2017, 21: 545-553.

23. Lian Zhongxu#, Xu Jinkai, Wang Zuobin, Wang Zhichao, Weng Zhankun, Yu Huadong, Fabrication and Applications of Two- and Three-dimensional Curved Surfaces with Robust underwater Superoleophobic Properties, J. Mater. Sci., 2017, 52(2):1123-1136.

22. Meng Qingling#, Wang Zuobin, Chai Xiangyu, Weng Zhankun, Ding Ran, Dong Litong, Fabrication of Hematite (α-Fe2O3) Nanoparticles Using Electrochemical Deposition, Appl. Surf. Sci., 2016, 368:303-308.

21. Hu Yaowei#, Wang Zuobin, Weng Zhankun, Yu Miao, Wang Dapeng, Bio-inspired Hierarchical Patterning of Silicon by Laser Interference Lithography, Appl. Optics, 2016, 55(12): 3226-3232.

20.Lian Zhongxu#, Xu Jinkai, Wang Zuobin, Weng Zhankun, Xu Zhe, Yu Huadong, Reversibly Switchable Wettability Between Underwater Superoleophobicity and Oleophobicity of Titanium Surface via Ethanol Immersion and Dark Storage, Appl. Surf. Sci., 2016, 390:244-247.

19. Lian Zhongxu#, Xu Jinkai, Wang Zuobin, Weng Zhankun, Wan Yanling, Zhang Linshuai, Yu Huadong, Research on HS-WEDM and Chemical Etching Technology of Superamphiphobic Surfaces on Al substrates, Micro & Nano Lett., 2016, 11(8): 425-429.

18. Li Li#, Wang Zuobin, Li Wenjun, Peng Kuiqing, Zhang ZiAng, Yu Miao, Song Zhengxun, Weng Zhankun, Wang Dapeng, Zhao Le, Fabrication of Pt Nanowires with A Diffraction-unlimited Feature Size by High-threshold Lithography, Appl. Phys. Lett., 2015, 107 (13): 133104 (1-5).

17.Xu L P, Li X, Zhan Z Y, Wang L, Feng S L, Chai X Y, Lu W Q, ShenJ, Weng Z K*, and Sun JieCatalyst-Free, Selective Growth of ZnO Nanowires on SiO2 by Chemical Vapor Deposition for Transfer-Free Fabrication of UV Photodetectors ACS Appl. Mater. & Inter., 2015, 7(36): 20264-20271 (通讯作者)(领域顶级刊物,IF 6.723.

16. Yu HuadongLian ZhongxuWan YanlingWeng ZhankunXu JinkaiYu ZhanjiangFabrication of durable superamphiphobic aluminum alloy surfaces with anisotropic sliding by HS-WEDM and solution immersion processesSurface and Coatings Technology, (2015) 275(15), 112–119IF 2.2.

15.Chai X Y, Weng Z K*, Xu LP and Wang Z.B., Tunable Electrochemical Oscillation and Regular 3D Nanopore Arrays of InP, Journal of The Electrochemical Society, 162 (9) E129-E133 (2015)(通讯作者)(IF3.266,领域顶级刊物,该文被科学网点评报道http://news.sciencenet.cn/htmlpaper/201571715282089536944.shtm).

14.Liu, Y, Li, L., Wang, S, Gao, P, Zhou, P, Li, J, Weng Z K, Zhang, J. Sub-band transport mechanism and switching properties for resistive switching nonvolatile memories with structure of silver/aluminum oxide/p-type silicon. Applied Physics Letters, (2015)106(6), 063506. SCI检索IF 3.302.

13.Wan, Y., Lian, Z., Xu, J., Weng, Z K., Yin, X., & Yu, H.. Fabrication of the stainless steel surface with super durable one-direction superhydrophobicity and two-direction anisotropic wettability. Micro & Nano Letters, (2014),9(10), 712-716. SCI检索IF 0.853.

12.Xu J, Wang Z, Zhang Z, Wang D, and Weng Z K. Fabrication of moth-eye structures on silicon by direct six-beam laser interference lithography. Journal of Applied Physics, (2014), 115(20), 203101. SCI检索 IF 2.183);

11.申慧娟,翁占坤,余小刚,贾秀丽,骆明辉,纳米技术在太阳能电池中的应用进展,微纳电子技术,2014512),78-82119.

10.Xu J, Wang Z B, Weng Z K, et al. Laser Interference Nanolithography with a 405nm Fiber Semiconductor Laser. Key Engineering Materials, 2013, 552: 262-267.

9.Sun H, Song Z X, Weng Z K, et al. Fabrication of Two-dimensional Photonic Crystal Structure with Defect by Holographic Lithography and Two-photon Polymerization[J]. Acta Photonica Sinica, 2011: S1.

8.Weng Z K, Zhang W, Wu C, et al. Selective etching of InP in NaF solution. Applied Surface Science, 2010, 256(7): 2052-2055SCI检索 IF 2.103.

7.Weng Z K, Liu A, Sang Y, et al. Anodic etching of InP using neutral NaCl electrolyte. Journal of Porous Materials, 2009, 16(6): 707-713SCI检索 IF 1.238.

6.Weng Z K, Liu A, Liu Y, et al. Photoluminescence and formation of ZnO thin films on n-InP (100) by electro-deposition. Chinese Journal of Luminescence, 2008, 29(2): 283.

5.Weng Z K, Liu A, Liu Y, et al. Fabrication of microrods and microtips of InP by electro- -chemical etching. Applied surface science, 2007, 253(11): 5133-5136SCI检索 IF 2.103.

4. Weng Z K, Liu A, Liu Y, et al. Formation of porous InP by cathodic decomposition. Microelectronics Journal, 2007, 38(12): 1191-1195SCI检索 IF0.836.

3.Zhao X L Weng Z K Chen GTian J Chen C RLuminescence Properties of Ca(NbO3)2Dy3+200321S),74-77SCI检索).

2.宋博,翁占坤,肖作江,龚晓辉,刘慎中,隋智通,提高铝合金上电镀镍层结合强度的研究,表面技术2003.32125-40.

1.李昌立,孙晶,蔡红星,翁占坤,高俊杰,胆甾相液晶的光学特性,液晶与显示2002173),193-198.

国际会议论文:

17. Zhang Yang#, Cao Liang, Chai Xiangyu, Liang Kaihua, Han Yonglu, Wang Yanqi, Wang Zhaoyang, Wang Shuting, Weng Zhankun*, Wang Zuobin, Transferring porous layer from InP wafer based on the disturbance, Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Chongqing, P.R. China, 2016.7.18-7.22.

16. Liu Lanjiao#, Wang Zuobin, Weng Zhankun, Li Li, Cai Jixing, Dong Litong, Song Zhengxun and Xu Hongmei, Nanomanipulation of Single Nanowires on Structured Surfaces Fabricated by Laser Interference Lithography, Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Chongqing, P.R. China, 2016. 7.18-7.22.

15. Xu Liping#, Lu Wenqiang, Zhan Zhaoyao, Cui Hongliang, Weng Zhankun, Catalyst-Free CVD Synthesis of ZnO Nanowire Networks on SiO2 Substrate and Its Photoresponse, Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Chongqing, P.R. China, 2016. 7.18-7.22.

14. Zhan Zhaoyao#, Lu Wenqiang, Xu Liping, and Weng Zhankun, Catalyst-Free Growth of ZnO Nanowires on SiO2 by Chemical Vapor Deposition for Transfer-Free Fabrication of UV photodetectors, Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), ChangchunP. R. China, 2015. 10.5-10.9.

13. Xiangyu Chai; Liping Xu; Dongdong Deng; Zi'ang Zhang; Li Li; Zhankun Weng; Hongmei Xu; Zuobin Wang,"Tunable oscillatory phenomenon during anodic of n-InP (100) by the CPCR model, "Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2014 International Conference on , vol., no., pp.347,350, Taibei, 2014,10.27-10.31.

12. Zhankun Weng; An'gang Yuan; Weixun Mi; Wendan Zhang; Cuiting Wu; Zuobin Wang, "Growth of porous InP: Transition from three to two dimensional structures," Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on, vol., no., pp.393,396, Suzhou, P. R. China, 2013,8.26-8.30.

11.Zhankun Weng; Lixin Dong; Miao Yu; Fubo Rao; Zheng Fan; Zuobin Wang,"Carbon nanogears and nanotori via combustion flames, Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on, vol., no., pp.352,355, 2013,8.5-8.8,Beijing, P. R. China.

10. Zhao, L.; Wang, Z.; Li, W.; Yu, M.; Zhang, Z.; Xu, J.; Yu, Y.; Weng, Z.; Li, S.; Maple, C.; Li, D.; Yue, Y., "Effect of pulse repetition rate on silicon wafer modification by four-beam laser interference,"Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2013 International Conference on, vol., no., pp.104,107, 26-30 Aug. 2013;doi: 10.1109/3M-NANO.2013.6737385

9. Zhao, L.; Wang, Z.; Wang, D.; Zhang, Z.; Yu, Y.; Weng, Z.; Maple, C.; Li, D.; Yue, Y., "Silicon wafer modification by laser interference,"Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on, vol., no., pp.1236,1239, 7-10 April 2013;doi: 10.1109/NEMS.2013.6559942

8.Jia Xu; Wei Zhang; Lanjiao Liu; Zuobin Wang; Jin Zhang; Zhengxun Song; Zhankun Weng; Zhen Hu; Yong Yue; Dayou Li, "Phase-shift control in two-beam laser interference lithography,"Mechatronics and Automation (ICMA), 2011 International Conference on, vol., no., pp.579,583, 7-10 Aug. 2011;doi: 10.1109/ICMA.2011.5985725

7. Bo Wang; Zhipeng Wei; Mei Li; Lu Zhou; Yongqin Hao; Zhankun Weng; Baoxue Bo; Guojun Liu; Yang Liu; Zuobin Wang,"Improved photoluminescence from passivated InP surface by (NH4)2S treatment,"Optoelectronics and Microelectronics Technology (AISOMT), 2011 Academic International Symposium on, vol., no., pp.142,146, 12-16 Oct. 2011; doi: 10.1109/AISMOT.2011.6159338

6.Lanjiao Liu; Haiyan Pan; Jia Xu; Hongmei Xu; Yong Yue; Dayou Li; Zhengxun Song; Zhankun Weng; Zhen Hu; Zuobin Wang; Jin Zhang, "Oblique fringe measurement by pattern correlation,"Information and Automation (ICIA), 2010 IEEE International Conference on, vol., no., pp.940,945,20-23 June 2010;doi:10.1109/ICINFA.2010.5512137

5.Guowei Xiu; Zhengxun Song; Zhen Hu; Zhankun Weng, "Nanolocalization of features in the patterns produced by Four-beam Laser Interference Lithography,"Mechanical and Electrical Technology (ICMET), 2010 2nd International Conference on, vol., no., pp.130,134, 10-12 Sept. 2010;Doi: 10.1109/ICMET.2010.5598336

4. Zhankun Weng; Lanjiao Liu; Jia Xu; Zhengxun Song; Zuobin Wang, "Fabrication of the InP nanopillars,"Mechanical and Electrical Technology (ICMET), 2010 2nd International Conference on, vol., no., pp.569,573, 10-12 Sept. 2010;doi: 10.1109/ICMET.2010.5598423

3.Haiyan Pan; Lanjiao Liu; Jia Xu; Hongmei Xu; Zhengxun Song; Zhankun Weng; Zhen Hu; Jin Zhang; Yong Yue; Dayou Li; Zuobin Wang, "Measurement of nanoscale surface patterns produced by two-beam laser interference lithography,"Mechatronics and Automation (ICMA), 2010 International Conference on, vol., no., pp.1754,1759, 4-7 Aug. 2010 ;doi: 10.1109/ICMA.2010.5588724;

2.Hao Song; Jia Xu; Yanyan Liu; Haiyan Pan; Zhengxun Song; Zhankun Weng; Zhen Hu; Zuobin Wang; Jin Zhang; Yong Yue; Dayou Li, "Beam alignment in Laser Interference Nanolithography,"Information Science and Engineering (ICISE), 2010 2nd International Conference on, vol., no., pp.1065,1068, 4-6 Dec. 2010;doi: 10.1109/ICISE.2010.5689617;

1.Xiangying Deng; Zhen Hu; Guowei Xiu; Dayou Li; Yong Yue; Zhengxun Song; Zhankun Weng; Jia Xu; Zuobin Wang, "Five-beam Interference Pattern Model for laser interference lithography," Information and Automation (ICIA), 2010 IEEE International Conference on, vol., no., pp.1208,1213, 20-23 June 2010;doi: 10.1109/ICINFA.2010.5512128.

授权发明专利

1翁占坤,王作斌,宋正勋,胡贞,徐佳,张锦,刘水庆,龚太全,激光干涉技术辅助电化学技术制备纳米栅极的方法,2015.9.2,中国,ZL 201010101489.3.

2翁占坤,邵金山,陈光,赵新乐,宋正勋,王作斌,基于纳米掩膜制备技术的电化学制备纳米阵列结构材料方法,2011.7.27,中国,ZL 200910067044.5.

3)王作斌,刘兰娇,董莉彤,翁占坤,宋正勋,范思哲,一种三探针机器人纳米操纵系统及方法,2016.6.8,中国,ZL 201510021712.6.

4)王作斌,张超,张文晓,刘劲芸,董莉彤,宋正勋,翁占坤,范思哲,一种磁力显微镜探针磁性污染的清洗方法,2016.8.17,中国,ZL 201510021718.3.

5)王作斌,刘劲芸,李大有,王国梁,巩略,曲英敏,于淼,董莉彤,宋正勋,翁占坤,一种气液通用的磁力显微操纵系统, 2016.9.7,中国, ZL 201510056553.3.

6)汪一飞,付璐,柴向宇,陈瑜,邵露青,潘思豪,翁占坤,董莉彤,王作斌,一种表面具有自清洁功能的密胺餐具,2015.11.18,中国,ZL 201520444813.X.

7)王作斌,刘兰娇,于占江,娄俊,翁占坤,宋正勋,许红梅,胡贞,王庆康,谢晖,杨宝学,生理条件下用纳米电极阵列测量生物细胞电特性的系统及方法,2014.7.30,中国,ZL 201310581887.3.

8)王作斌,张子昂,王大鹏,于淼,宋正勋,翁占坤,胡贞,许红梅,一种微结构周期可控的大面积黑硅的制造方法,2.16.10.19,中国,ZL 201210523560.6.

9)王作斌,王大鹏,张子昂,刘洋,于淼,宋正勋,翁占坤,胡贞,许红梅,一种激光干涉纳米光刻制备双重周期纳米结构的方法,2016.11.30,中国,ZL 201210523661.3.

10)王作斌,张子昂,王大鹏,宋正勋,翁占坤,胡贞,许红梅,李理,于淼,曲英敏,一种生物细胞特性测量纳米电极阵列及其制造方法,2015.12.30,中国,ZL 201310582012.5.

11)皮建国,胡贞,王作斌,宋正勋,翁占坤,刘洋,基于探测具有纳米级表面微结构的参考模型的测量系统,2013.11,中国,ZL 201120320449.8.

12)于淼,赵振明,王作斌,徐佳,翁占坤,王大鹏,刘洋,宋正勋,胡贞,一种仿真飞蛾复眼光学减反射结构图案的方法和系统,2013.7.10,中国,ZL 201110145715.2.

13)王作斌,宋浩,徐佳,翁占坤,宋正勋,胡贞,刘兰娇,激光干涉纳米光刻中光束入射姿态检测及校准的方法和系统,2016.1.6,中国,ZL 201010511168.0.

14)王作斌,刘洋,赵乐,刘兰娇,徐佳,侯煜,翁占坤,宋正勋,胡贞,激光干涉光刻技术制作过滤膜网孔结构的方法,2013.2.20,中国,ZL 201010279175.2.

15)王作斌,张薇,徐佳,刘兰娇,侯煜,潘海艳,宋浩,刘洋,翁占坤,宋正勋,胡贞,一种在激光干涉光刻中实现相移的方法和系统,2016.3.30,中国,ZL 201010287019.0.

16)张锦,王作斌,刘水庆,宋正勋,翁占坤,刘国强,一种太阳能电池表面减反射结构的制作系统及制作方法,2013.3.6,中国,ZL 201010244795.2.

17翁占坤,王朝阳,曹亮,王璐,董莉彤,王作斌,宋正勋,许红梅,刘兰娇,李理,一种激光干涉光刻光学系统,申请日:2016.11.23,中国,201611037444.8.

 

 
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